​Atomic Layer Engineering Lab

Film deposition system:

Atomic Layer Deposition (ALD) systems

• Fiji F200

• Fiji G2

• Savannah

• Beneq

​​

Physical Vapor Deposition system

• Evaporator

• Sputter (Accessible)

• E-gun evaporator (Accessible)

​​

​

Characterization:​

• C-V, I-V, Pulse measurement

• Autolab(EIS)

• Hall Effect

• Raman

• ​TF 2000 (Accessible)

• AFM (Accessible)

• Helium ion microscope (Accessible)

And more...